Scaricare la presentazione
La presentazione è in caricamento. Aspetta per favore
1
Istituto per la Microelettronica e Microsistemi- CNR Unità di Napoli Commessa: Microsistemi optoelettronici in silicio e tecnologie compatibili ORGANICO: 7 ricercatori 7 ricercatori 4 tecnici 4 tecnici 1 amministrativo 1 amministrativo 1 post-doc, 8 dottorandi, 2 borsisti / contrattisti 1 post-doc, 8 dottorandi, 2 borsisti / contrattisti
2
Main facilities @ IMM-NA ISO 6/7 clean room (150 m 2 ) - Plasma deposition & etching systems - Thermal & e-beam evaporation - DC-RF Sputtering system - Optical & e-beam Lithography - Thermal treatment systems Characterization labs (500 m 2 ) - Optoelectronic device characterization - Optical & Structural Material characterization - Electrical characterization Optoelectronic device and circuits design lab - Process analysis - Electronic & Photonic behavior - Thermo-structural analysis Luigi Sirleto – Mantova 24 maggio 2007
3
Silicon Photonics Raman light sources Photodetectors: Internal Photoemission n-Si Substrate n-Si (λ/2 thick) Schottky Metal Si 3 N 4 coating n-Si (3λ/4 thick) SiO 2 (λ/4 thick) Optical modulators: PBG and Negative Refraction Silicon chip
Presentazioni simili
